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1. (WO2018106831) PATTERNING METAL REGIONS ON METAL OXIEDE FILMS/METAL FILMS BY SELECTIVE REDUCTION/OXIDATION USING LOCALIZED THERMAL HEATING

Pub. No.:    WO/2018/106831    International Application No.:    PCT/US2017/064952
Publication Date: Fri Jun 15 01:59:59 CEST 2018 International Filing Date: Thu Dec 07 00:59:59 CET 2017
IPC: C23C 14/58
C23C 16/56
C23C 16/40
Applicants: BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM
Inventors: BONNECAZE, Roger
CHOPRA, Meghali
CHOPRA, Sonali
BINAGIA, Jeremy
EKERDT, John
EDMONDSON, Bryce
Title: PATTERNING METAL REGIONS ON METAL OXIEDE FILMS/METAL FILMS BY SELECTIVE REDUCTION/OXIDATION USING LOCALIZED THERMAL HEATING
Abstract:
A method for creating metal patterns. A metal oxide film/metal film is deposited on a substrate in a reactor. After the metal oxide film/metal film has been deposited, the desired metal regions/metal oxide regions are formed on the metal oxide film/metal film using a reduction/oxidation reaction. A reducing/oxidizing gas is fed into the reactor. Furthermore, a heat source, such as a thermal probe or a high intensity laser beam, is pulsed to heat and form metal regions/metal oxide regions on the metal oxide film/metal film within the metal's reduction/oxidation window. In this manner, benefits over prior patterning techniques are achieved, including greater control and uniformity, reduced cost, less waste and potential for sub-5nm features.