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1. (WO2018106814) BULK ACOUSTIC WAVE SENSOR HAVING AN OVERMODED RESONATING STRUCTURE

Pub. No.:    WO/2018/106814    International Application No.:    PCT/US2017/064926
Publication Date: Fri Jun 15 01:59:59 CEST 2018 International Filing Date: Thu Dec 07 00:59:59 CET 2017
IPC: G01N 29/02
H03H 9/15
Applicants: QORVO US, INC.
Inventors: MCCARRON, Kevin
MORTON, Rick
Title: BULK ACOUSTIC WAVE SENSOR HAVING AN OVERMODED RESONATING STRUCTURE
Abstract:
A bulk acoustic wave sensor includes a delay layer. The sensor includes an acoustic mirror and a base resonator. The base resonator includes a piezoelectric layer and two electrodes. One or more delay layers are disposed adjacent to the base resonator. A delay layer may be disposed between the base resonator and the acoustic mirror, a delay layer may be disposed on the base resonator opposite to the acoustic mirror, or both. Each delay section is formed of high quality-factor material. The sensor may define a resonant frequency, and the thickness of each delay section may be an integer multiple of half- wavelengths of the resonant frequency.