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1. (WO2018106513) RAMPING OF SENSOR POWER IN A MICROELECTROMECHANICAL SYSTEM DEVICE
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Pub. No.: WO/2018/106513 International Application No.: PCT/US2017/064036
Publication Date: 14.06.2018 International Filing Date: 30.11.2017
IPC:
B81B 7/02 (2006.01) ,B81B 7/04 (2006.01) ,G01L 27/02 (2006.01) ,G01L 23/12 (2006.01) ,H04R 19/04 (2006.01) ,H04R 1/04 (2006.01) ,H04R 19/01 (2006.01)
B PERFORMING OPERATIONS; TRANSPORTING
81
MICRO-STRUCTURAL TECHNOLOGY
B
MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES
7
Micro-structural systems
02
containing distinct electrical or optical devices of particular relevance for their function, e.g. micro-electro-mechanical systems (MEMS)
B PERFORMING OPERATIONS; TRANSPORTING
81
MICRO-STRUCTURAL TECHNOLOGY
B
MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES
7
Micro-structural systems
04
Networks or arrays of similar micro-structural devices
G PHYSICS
01
MEASURING; TESTING
L
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
27
Testing or calibrating of apparatus for measuring fluid pressure
02
of indicators
G PHYSICS
01
MEASURING; TESTING
L
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
23
Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
08
operated electrically
12
by changing capacitance or inductance
H ELECTRICITY
04
ELECTRIC COMMUNICATION TECHNIQUE
R
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
19
Electrostatic transducers
04
Microphones
H ELECTRICITY
04
ELECTRIC COMMUNICATION TECHNIQUE
R
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
1
Details of transducers
02
Casings; Cabinets; Mountings therein
04
Structural association of microphone with electric circuitry therefor
H ELECTRICITY
04
ELECTRIC COMMUNICATION TECHNIQUE
R
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
19
Electrostatic transducers
01
characterised by the use of electrets
Applicants:
KNOWLES ELECTRONICS, LLC [US/US]; 1151 Maplewood Drive Itasca, Illinois 60143, US
Inventors:
FURST, Claus; US
CHANDRASEKARAN, Venkataraman; US
Agent:
BELDEN, Brett P.; US
GUNDERSEN, Jeffrey S.; US
Priority Data:
62/430,09205.12.2016US
Title (EN) RAMPING OF SENSOR POWER IN A MICROELECTROMECHANICAL SYSTEM DEVICE
(FR) AUGMENTATION DE PUISSANCE DE CAPTEUR DANS UN DISPOSITIF DE TYPE SYSTÈME MICRO-ÉLECTROMÉCANIQUE
Abstract:
(EN) A microelectromechanical system (MEMS) device includes at least one substrate, a lid, a MEMS component, a sensor, and a power supply. The lid is coupled to the substrate so that the substrate and the lid cooperatively define an interior cavity. The MEMS component is disposed within the interior cavity. The sensor is disposed within the interior cavity and is arranged to detect a parameter of the interior cavity. The power supply provides current to the sensor. The power supply is configured to control current during a ramp-up transition of the current and a ramp-down transition of the current such that the ramp-up transition and the ramp-down transition have attenuated high-frequency components.
(FR) L'invention concerne un dispositif de type système micro-électromécanique (MEMS) comprenant au moins un substrat, un couvercle, un composant MEMS, un capteur et une alimentation électrique. Le couvercle est couplé au substrat de sorte que le substrat et le couvercle définissent en coopération une cavité intérieure. Le composant MEMS est disposé au sein de la cavité intérieure. Le capteur est disposé à l'intérieur de la cavité intérieure et est conçu pour détecter un paramètre de la cavité intérieure. L'alimentation électrique fournit du courant au capteur. L'alimentation électrique est conçue pour commander le courant pendant une transition d'accélération du courant et une transition de décélération du courant de sorte que la transition d'accélération et la transition de décélération présentent des composantes à haute fréquence atténuées.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)