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1. (WO2018105674) RELEASE LAYER PRODUCTION METHOD

Pub. No.:    WO/2018/105674    International Application No.:    PCT/JP2017/043907
Publication Date: Fri Jun 15 01:59:59 CEST 2018 International Filing Date: Fri Dec 08 00:59:59 CET 2017
IPC: B05D 7/24
B05D 3/02
B05D 5/00
C08G 73/10
H01L 21/336
H01L 29/786
Applicants: NISSAN CHEMICAL CORPORATION
日産化学株式会社
Inventors: EBARA Kazuya
江原 和也
Title: RELEASE LAYER PRODUCTION METHOD
Abstract:
A release layer production method is provided which involves a step for coating a substrate with a release layer forming composition and firing at a maximum temperature of no less than 400°C, wherein the release layer forming composition contains an organic solvent, and a polyamic acid having both ends derived from a tetracarboxylic acid, with either one or both of said ends sealed with 2-aminophenol.