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1. (WO2018105123) NANOPORE-FORMING METHOD, NANOPORE-FORMING DEVICE AND BIOMOLECULE MEASUREMENT DEVICE

Pub. No.:    WO/2018/105123    International Application No.:    PCT/JP2016/086812
Publication Date: Fri Jun 15 01:59:59 CEST 2018 International Filing Date: Sat Dec 10 00:59:59 CET 2016
IPC: B01J 19/08
B82Y 5/00
C12M 1/00
B81C 1/00
Applicants: HITACHI HIGH-TECHNOLOGIES CORPORATION
株式会社日立ハイテクノロジーズ
Inventors: YANAGAWA Yoshimitsu
柳川 善光
TAKEDA Kenichi
武田 健一
YANAGI Itaru
柳 至
GOTO Yusuke
後藤 佑介
MATSUI Kazuma
松井 一真
Title: NANOPORE-FORMING METHOD, NANOPORE-FORMING DEVICE AND BIOMOLECULE MEASUREMENT DEVICE
Abstract:
The present invention forms nanopores in a thin film at high speed by: applying a first modulation voltage on the thin film; comparing a threshold value with the magnitude of change in the phase of the electric current flowing in the thin film with respect to the phase of the first modulation voltage; and when the magnitude of the phase change is detected to have exceeded the threshold value, stopping the application of the first modulation voltage.