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1. (WO2018105008) POWER GENERATING ELEMENT MANUFACTURING METHOD

Pub. No.:    WO/2018/105008    International Application No.:    PCT/JP2016/086075
Publication Date: Fri Jun 15 01:59:59 CEST 2018 International Filing Date: Tue Dec 06 00:59:59 CET 2016
IPC: H02N 2/18
H01L 41/113
Applicants: TRI-FORCE MANAGEMENT CORPORATION
株式会社トライフォース・マネジメント
Inventors: OKADA Kazuhiro
岡田 和廣
OKADA Miho
岡田 美穂
Title: POWER GENERATING ELEMENT MANUFACTURING METHOD
Abstract:
A power generating element 10 is manufactured by stacking a main substrate K1, an intermediate substrate K2, and a base substrate K3. Etching or dicing is performed with respect to an upper-surface side of an unprocessed intermediate substrate K2 to form a groove 42 for separating portions that are to become a first base portion 34 and a weight body 22 from the other portions. Further, a part of the upper-surface side of the portion that is to become the weight body 22 and the upper-surface side of the other portions are dug and recessed by etching. The upper-surface side of the intermediate substrate K2 is contacted with the back-surface side of the main substrate K1, the first base portion 34 is bonded to a peripheral portion 12, and the weight body 22 is bonded to a weight body attachment portion 16. The intermediate substrate K2 is cut from the back-surface side at the position of the groove 42, thereby removing the other portions.