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1. (WO2018104573) TRANSPARENT AND ELECTROCONDUCTING COVERINGS CONTAINING NITRIDES, BORIDES OR CARBIDES
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Pub. No.: WO/2018/104573 International Application No.: PCT/ES2017/070802
Publication Date: 14.06.2018 International Filing Date: 07.12.2017
IPC:
G03F 1/22 (2012.01) ,G03F 1/38 (2012.01)
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
1
Originals for photomechanical production of textured or patterned surfaces, e.g. masks, photo-masks or reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
22
Masks or mask blanks for imaging by radiation of 100 nm or shorter wavelength, e.g. X-ray masks, extreme ultra-violet [EUV] masks; Preparation thereof
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
1
Originals for photomechanical production of textured or patterned surfaces, e.g. masks, photo-masks or reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
38
Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
Applicants: FUNDACIÓ INSTITUT DE CIÈNCIES FOTÒNIQUES[ES/ES]; Parque Mediterràneo de la Tecnologia, Av. Carl Friedrich Gauss, num. 3 08860 CASTELLDEFELS (Barcelona), ES
INSTITUCIÓ CATALANA DE RECERCA I ESTUDIS AVANÇATS[ES/ES]; Passeig Lluís Companys, 23 08010 BARCELONA, ES
Inventors: PRUNERI, Valerio; ES
MANIYARA, Rinu, Abraham; ES
Agent: CARPINTERO LOPEZ, Francisco; ES
Priority Data:
15/371,90407.12.2016US
15/722,49302.10.2017US
Title (EN) TRANSPARENT AND ELECTROCONDUCTING COVERINGS CONTAINING NITRIDES, BORIDES OR CARBIDES
(FR) REVÊTEMENTS TRANSPARENTS ET ÉLECTROCONDUCTEURS À BASE DE NITRURES, DE BORURES OU DE CARBURES
(ES) RECUBRIMIENTOS TRANSPARENTES Y ELÉCTRICAMENTE CONDUCTORES QUE CONTIENEN NITRUROS, BORUROS O CARBUROS
Abstract:
(EN) The present invention relates to compositions for photolithographic masks comprising a substrate and a covering having at least one electroconducting layer containing a nitride, a boride or a carbide, and to methods for preparing the same.
(FR) La présente invention concerne des compositions pour masques photolithographiques qui comprennent un substrat et un revêtement qui possède au moins une couche électroconductrice contenant un nitrure, un borure ou un carbure, ainsi que des procédés de préparation desdites compositions.
(ES) La presente invención se refiere a composiciones para máscaras fotolitográficas que comprenden un sustrato y un recubrimiento que tiene al menos una capa conductora eléctrica que comprende un nitruro, un boruro o un carburo, y métodos de preparación de las mismas.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Spanish (ES)
Filing Language: Spanish (ES)