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1. (WO2018104573) TRANSPARENT AND ELECTROCONDUCTING COVERINGS CONTAINING NITRIDES, BORIDES OR CARBIDES
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.:    WO/2018/104573    International Application No.:    PCT/ES2017/070802
Publication Date: 14.06.2018 International Filing Date: 07.12.2017
IPC:
G03F 1/22 (2012.01), G03F 1/38 (2012.01)
Applicants: FUNDACIÓ INSTITUT DE CIÈNCIES FOTÒNIQUES [ES/ES]; Parque Mediterràneo de la Tecnologia, Av. Carl Friedrich Gauss, num. 3 08860 CASTELLDEFELS (Barcelona) (ES).
INSTITUCIÓ CATALANA DE RECERCA I ESTUDIS AVANÇATS [ES/ES]; Passeig Lluís Companys, 23 08010 BARCELONA (ES)
Inventors: PRUNERI, Valerio; (ES).
MANIYARA, Rinu, Abraham; (ES)
Agent: CARPINTERO LOPEZ, Francisco; (ES)
Priority Data:
15/371,904 07.12.2016 US
15/722,493 02.10.2017 US
Title (EN) TRANSPARENT AND ELECTROCONDUCTING COVERINGS CONTAINING NITRIDES, BORIDES OR CARBIDES
(ES) RECUBRIMIENTOS TRANSPARENTES Y ELÉCTRICAMENTE CONDUCTORES QUE CONTIENEN NITRUROS, BORUROS O CARBUROS
(FR) REVÊTEMENTS TRANSPARENTS ET ÉLECTROCONDUCTEURS À BASE DE NITRURES, DE BORURES OU DE CARBURES
Abstract: front page image
(EN)The present invention relates to compositions for photolithographic masks comprising a substrate and a covering having at least one electroconducting layer containing a nitride, a boride or a carbide, and to methods for preparing the same.
(ES)La presente invención se refiere a composiciones para máscaras fotolitográficas que comprenden un sustrato y un recubrimiento que tiene al menos una capa conductora eléctrica que comprende un nitruro, un boruro o un carburo, y métodos de preparación de las mismas.
(FR)La présente invention concerne des compositions pour masques photolithographiques qui comprennent un substrat et un revêtement qui possède au moins une couche électroconductrice contenant un nitrure, un borure ou un carbure, ainsi que des procédés de préparation desdites compositions.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: Spanish (ES)
Filing Language: Spanish (ES)