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1. (WO2018103678) GRAPHITE BOAT SIDE DISCHARGING MECHANISM PROVIDED WITH INVERTED WAFER DETECTION DEVICE

Pub. No.:    WO/2018/103678    International Application No.:    PCT/CN2017/114882
Publication Date: Fri Jun 15 01:59:59 CEST 2018 International Filing Date: Fri Dec 08 00:59:59 CET 2017
IPC: H01L 21/67
H01L 21/677
Applicants: S.C NEW ENERGY TECHNOLOGY CORPORATION
深圳市捷佳伟创新能源装备股份有限公司
Inventors: WE, Ou
文鸥
ZHANG, Yong
张勇
Title: GRAPHITE BOAT SIDE DISCHARGING MECHANISM PROVIDED WITH INVERTED WAFER DETECTION DEVICE
Abstract:
A graphite boat side discharging mechanism provided with an inverted wafer detection device. A graphite boat (3) is placed on a graphite boat bearing base (2) of the side discharging mechanism. Multiple grooves in parallel along the whole width thereof are formed in the graphite boat, each groove extends along the whole length of the graphite boat, a silicon wafer is placed in each groove, and the side discharging mechanism (1) drives the graphite boat to move. The inverted wafer detection device comprises multiple reflective bases (4) and multiple photoelectric switches (5), and the multiple reflective bases are disposed at intervals along the whole length of the graphite boat below the graphite boat. The multiple photoelectric switches are disposed along the whole width of the graphite boat above the graphite boat, and each photoelectric switch corresponds to one groove in the graphite boat. Inverted wafers in the graphite boat can be detected and the graphite boat provided with inverted wafers is returned to an automatic wafer insertion machine for manual correction, and accordingly, poor silicon wafer coating and waste of silicon wafers caused due to the existence of the inverted wafers in the graphite boat are avoided.