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1. (WO2018102852) SOLAR CELL FABRICATION

Pub. No.:    WO/2018/102852    International Application No.:    PCT/AU2017/000260
Publication Date: Fri Jun 15 01:59:59 CEST 2018 International Filing Date: Wed Dec 06 00:59:59 CET 2017
IPC: H01L 21/203
H01L 31/0376
H01L 31/0392
C23C 14/34
C23C 14/58
Applicants: THE AUSTRALIAN NATIONAL UNIVERSITY
Inventors: YAN, Di
CUEVAS, Andres
Title: SOLAR CELL FABRICATION
Abstract:
The invention relates to a process for fabricating a solar cell. The process comprises depositing a layer of amorphous silicon on a substrate using physical vapour deposition, said substrate being a layer of a dielectric disposed on a silicon wafer. The amorphous silicon is then annealed so as to generate a layer of polycrystalline silicon on the substrate.