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1. (WO2018102470) METHOD AND APPARATUS FOR CHEMICAL IMAGING ATOMIC FORCE MICROSCOPE INFRARED SPECTROSCOPY
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Pub. No.: WO/2018/102470 International Application No.: PCT/US2017/063810
Publication Date: 07.06.2018 International Filing Date: 29.11.2017
IPC:
G01N 21/47 (2006.01) ,B82Y 35/00 (2011.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
17
Systems in which incident light is modified in accordance with the properties of the material investigated
47
Scattering, i.e. diffuse reflection
B PERFORMING OPERATIONS; TRANSPORTING
82
NANO-TECHNOLOGY
Y
SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE  OR TREATMENT OF NANO-STRUCTURES
35
Methods or apparatus for measurement or analysis of nano-structures
Applicants:
ANASYS INSTRUMENTS CORPORATION [US/US]; 325 Chapala Street Santa Barbara, CA 93101, US
Inventors:
PRATER, Craig; US
KJOLLER, Kevin; US
SHETTY, Roshan; US
Agent:
PEDERSEN, Brad, D.; US
CHADWICK, Eric, H.; US
BIASCO, Tye; US
BRUZZONE, Daniel, L.; US
BURGESS, Daidre, L.; US
Priority Data:
62/427,67129.11.2016US
Title (EN) METHOD AND APPARATUS FOR CHEMICAL IMAGING ATOMIC FORCE MICROSCOPE INFRARED SPECTROSCOPY
(FR) PROCÉDÉ ET APPAREIL DE SPECTROSCOPIE INFRAROUGE POUR MICROSCOPE À FORCE ATOMIQUE EN IMAGERIE CHIMIQUE
Abstract:
(EN) Methods and apparatus for performing spectroscopy from the scale of nanometers to millimeters and imaging techniques including atomic force microscopy, infrared spectroscopy, confocal microscopy, Raman spectroscopy and mass spectrometry. For infrared spectroscopy, a sample is illuminated with infrared light and the resulting sample distortion is read out with either a focused UV/visible light beam and/or AFM tip. The combination of both techniques provides a rapid and large area survey scan with the UV /visible light and a high resolution measurement with the AFM tip. The methods and apparatus also include the ability to analyze light reflected/scattered from the sample via a Raman spectrometer for complementary analysis by Raman spectroscopy.
(FR) L'invention concerne des procédés et un appareil pour effectuer une spectroscopie à une échelle allant des nanomètres aux millimètres et des techniques d'imagerie comprenant la microscopie à force atomique, la spectroscopie infrarouge, la microscopie confocale, la spectroscopie Raman et la spectrométrie de masse. Pour la spectroscopie infrarouge, un échantillon est éclairé à l'aide d'une lumière infrarouge et la distorsion d'échantillon obtenue est lue soit avec un faisceau de lumière UV/visible focalisé, et/ou une pointe de sonde AFM. La combinaison des deux techniques permet un balayage d'observation rapide et d'une grande surface avec la lumière UV/visible et une mesure de résolution élevée avec la pointe de sonde AFM. Les procédés et l'appareil selon l'invention englobent également la capacité d'analyser la lumière réfléchie/diffusée à partir de l'échantillon par l'intermédiaire d'un spectromètre Raman pour une analyse complémentaire par spectroscopie Raman.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)