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1. (WO2018102439) ATOMIC FORCE MICROSCOPY BASED ON NANOWIRE TIPS FOR HIGH ASPECT RATIO NANOSCALE METROLOGY/CONFOCAL MICROSCOPY

Pub. No.:    WO/2018/102439    International Application No.:    PCT/US2017/063754
Publication Date: Fri Jun 08 01:59:59 CEST 2018 International Filing Date: Thu Nov 30 00:59:59 CET 2017
IPC: G01Q 70/08
G01Q 70/16
G01Q 60/06
G01Q 60/38
B82Y 35/00
Applicants: STC. UNM
Inventors: BUSANA, Tito
BRUECK, Steven R.J.
FEEZELL, Daniel
BEHZADIRAD, Mahmoud
Title: ATOMIC FORCE MICROSCOPY BASED ON NANOWIRE TIPS FOR HIGH ASPECT RATIO NANOSCALE METROLOGY/CONFOCAL MICROSCOPY
Abstract:
Nanowires that may be utilized in microscopy, for example atomic force microscopy (AFM), as part of an AFM probe, as well as for other uses, are disclosed. The nanowires may be formed from a Group III nitride such as an epitaxial layer that may be or include gallium nitride, indium nitride, aluminum nitride, and an alloy of these materials. During use of the AFM probe to measure a topography of a test sample surface, the nanowire can activated and caused to lase and emit a light, thereby illuminating the surface with the light. In an implementation, the light can be collected by the AFM probe itself, for example through an optical fiber to which the nanowire is attached.