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1. (WO2018102223) IMAGING DEVICES HAVING PIEZOELECTRIC TRANSDUCERS

Pub. No.:    WO/2018/102223    International Application No.:    PCT/US2017/063163
Publication Date: Fri Jun 08 01:59:59 CEST 2018 International Filing Date: Fri Nov 24 00:59:59 CET 2017
IPC: A61B 8/00
A61B 8/08
B06B 1/06
G01H 11/08
H01L 41/047
H01L 41/09
Applicants: EXO IMAGING INC.
Inventors: AKKARAJU, Sandeep
KWON, Haesung
HAQUE, Yusuf
BRYZEK, Janusz
Title: IMAGING DEVICES HAVING PIEZOELECTRIC TRANSDUCERS
Abstract:
An imaging system (120) includes: a transceiver cell (210) for generating a pressure wave and converting an external pressure wave into an electrical signal; and a control unit (208) for controlling an operation of the transceiver cell (210). The transceiver cell (210) includes: a substrate (501); at least one membrane (504) suspending from the substrate (501); and a plurality of transducer elements (520) mounted on the at least one membrane. Each of the plurality of transducer elements (520) has a bottom electrode (806), a piezoelectric layer (804) on bottom electrode (806), and at least one top electrode (802) on the piezoelectric layer (804). Each of the plurality of transducer elements (520) generates a bending moment in response to applying an electrical potential across the bottom electrode (806) and the at least one top electrode (802) and develops an electrical charge in response to a bending moment due to the external pressure wave.