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1. (WO2018101133) X-RAY FLUORESCENCE ANALYZER

Pub. No.:    WO/2018/101133    International Application No.:    PCT/JP2017/041896
Publication Date: Fri Jun 08 01:59:59 CEST 2018 International Filing Date: Wed Nov 22 00:59:59 CET 2017
IPC: G01N 23/223
G01N 23/207
Applicants: RIGAKU CORPORATION
株式会社リガク
Inventors: SAKO, Yukio
迫 幸雄
Title: X-RAY FLUORESCENCE ANALYZER
Abstract:
The purpose of the present invention is to provide an X-ray fluorescence analyzer having a simple structure and being capable of rapidly performing highly accurate analysis. This X-ray fluorescence analyzer has: an X-ray source (100) that irradiates primary X rays on a sample (103); a spectroscopic element (120) that splits a secondary X ray generated from the sample (103); an energy-dispersive detector (110) that measures the intensity of the secondary X ray; a retracting mechanism (108) that retracts the spectroscopic element (120) from the secondary X ray path; a scanning mechanism (114) that continuously moves the detector (110) between an auxiliary measurement area (124) in which the secondary X ray is measured in a state in which the spectroscopic element (120) is retracted and a main measurement area (122) in which the split secondary X ray is measured; a storage device (116) that pre-stores ratios between background intensities measured in the auxiliary measurement area (124) and the background intensities measured in the main measurement area (122); and a calculation device (118) that performs correction and quantitative analysis, said correction comprising a value, being the background intensity in the auxiliary measurement area (124) multiplied by the ratio, being deducted from the measured intensity in the main measurement area (122).