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1. (WO2018100881) PLACEMENT STAND AND ELECTRONIC DEVICE INSPECTING APPARATUS
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Pub. No.: WO/2018/100881 International Application No.: PCT/JP2017/036400
Publication Date: 07.06.2018 International Filing Date: 29.09.2017
Chapter 2 Demand Filed: 14.06.2018
IPC:
G01R 31/26 (2014.01) ,H01L 21/66 (2006.01) ,H01L 21/683 (2006.01)
G PHYSICS
01
MEASURING; TESTING
R
MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
31
Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
26
Testing of individual semiconductor devices
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
66
Testing or measuring during manufacture or treatment
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683
for supporting or gripping
Applicants:
東京エレクトロン株式会社 TOKYO ELECTRON LIMITED [JP/JP]; 東京都港区赤坂五丁目3番1号 3-1, Akasaka 5-chome, Minato-ku, Tokyo 1076325, JP
Inventors:
河西 繁 KASAI Shigeru; JP
藤澤 良徳 FUJISAWA Yoshinori; JP
Agent:
別役 重尚 BECCHAKU Shigehisa; 東京都港区東新橋2丁目16番1号 ルーシスビル2階 Lusis Bldg. 2nd Floor, 16-1, Higashi Shinbashi 2-chome, Minato-ku, Tokyo 1050021, JP
村松 聡 MURAMATSU Satoshi; 東京都港区東新橋2丁目16番1号ルーシスビル2階 Lusis Bldg. 2nd Floor, 16-1, Higashi Shinbashi 2-chome, Minato-ku, Tokyo 1050021, JP
Priority Data:
2016-23184429.11.2016JP
2017-05436621.03.2017JP
2017-13540111.07.2017JP
Title (EN) PLACEMENT STAND AND ELECTRONIC DEVICE INSPECTING APPARATUS
(FR) SOCLE DE PLACEMENT ET APPAREIL D'INSPECTION DE DISPOSITIF ÉLECTRONIQUE
(JA) 載置台及び電子デバイス検査装置
Abstract:
(EN) Provided is an electronic device inspecting apparatus which allows curbing of rising costs. A prober 10 is provided with a stage 11 on which a carrier C and a wafer W are placed. The stage 11 is provided with a stage lid 27 on which the carrier C is placed, a cooling unit 29 which comes into contact with the stage lid 27, and an LED irradiation unit 30 which is arranged so as to face the carrier C across the stage lid 27 and the cooling unit 29. Each of the stage lid 27 and the cooling unit 29 is formed of a light transmitting member. A light transmittable refrigerant flows in a refrigerant flow path 28 in the cooling unit 29. The LED irradiation unit 30 has multiple LEDs 32 which are directed to the carrier C. The carrier C is formed of a glass substrate 24 having a substantially disc-like shape. A plurality of electronic devices 25 are arranged at a predetermined interval therebetween on a surface of the carrier C.
(FR) L'invention concerne un appareil d'inspection de dispositif électronique permettant de réduire des hausses de prix. Un sondeur (10) comprend un étage (11) sur lequel sont placés un support (C) et une tranche (W). L'étage (11) comprend un couvercle d'étage (27) sur lequel est placé le support (C), une unité de refroidissement (29) qui vient en contact avec le couvercle d'étage (27) et une unité d'irradiation à DEL (30) agencée de façon à faire face au support (C) à travers le couvercle d'étage (27) et l'unité de refroidissement (29). Le couvercle d'étage (27) et l'unité de refroidissement (29) sont formés d'un élément d'émission de lumière. Un réfrigérant à émission de lumière s'écoule dans un trajet d'écoulement de réfrigérant (28) dans l'unité de refroidissement (29). L'unité d'irradiation à DEL (30) comprend des DEL multiples (32) dirigées vers le support (C). Le support (C) est formé d'un substrat de verre (24) présentant une forme sensiblement en forme de disque. Une pluralité de dispositifs électroniques (25) sont agencés à un intervalle prédéterminé entre ces derniers sur une surface du support (C).
(JA) コスト高を抑制することができる電子デバイス検査装置を提供する。プローバ10はキャリアCやウエハWを載置するステージ11を備え、該ステージ11は、キャリアCが載置されるステージ蓋27と、該ステージ蓋27と当接する冷却ユニット29と、ステージ蓋27及び冷却ユニット29を介してキャリアCに対向するように配置されるLED照射ユニット30とを備え、ステージ蓋27及び冷却ユニット29は光透過部材からなり、冷却ユニット29の冷媒流路28を光が透過可能な冷媒が流れ、LED照射ユニット30はキャリアCを指向する多数のLED32を有し、キャリアCは略円板状のガラス基板24からなり、複数の電子デバイス25が互いに所定の間隔をおいて表面に配置されている。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)