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1. (WO2018100873) X-RAY FLUORESCENCE ANALYZER
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Pub. No.: WO/2018/100873 International Application No.: PCT/JP2017/036183
Publication Date: 07.06.2018 International Filing Date: 04.10.2017
IPC:
G01N 23/223 (2006.01) ,G01N 23/207 (2006.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
23
Investigating or analysing materials by the use of wave or particle radiation not covered by group G01N21/ or G01N22/159
22
by measuring secondary emission
223
by irradiating the sample with X-rays and by measuring X-ray fluorescence
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
23
Investigating or analysing materials by the use of wave or particle radiation not covered by group G01N21/ or G01N22/159
20
by using diffraction of the radiation, e.g. for investigating crystal structure; by using reflection of the radiation
207
by means of diffractometry using detectors, e.g. using an analysing crystal or a crystal to be analysed in a central position and one or more displaceable detectors in circumferential positions
Applicants: RIGAKU CORPORATION[JP/JP]; 3-9-12, Matsubara-cho, Akishima-shi, Tokyo 1968666, JP
Inventors: SAKO, Yukio; JP
Agent: HARUKA PATENT & TRADEMARK ATTORNEYS; Rokubancho SK Bldg. 5th Floor, 3, Rokubancho, Chiyoda-ku, Tokyo 1020085, JP
Priority Data:
2016-23445401.12.2016JP
Title (EN) X-RAY FLUORESCENCE ANALYZER
(FR) ANALYSEUR PAR FLUORESCENCE X
(JA) 蛍光X線分析装置
Abstract:
(EN) Provided is an X-ray fluorescence analyzer that is capable of: high-precision analysis in which background components are removed; and rapid measurement. The X-ray fluorescence analyzer has: an X-ray source (100) that irradiates a primary X ray that generates a secondary X ray, irradiating same on to a specimen (101) surface at an irradiation diameter of at least 1 mm; a spectroscopic element (106) that splits the secondary X ray; a first detector (108) that measures the intensity of the secondary X ray split by the spectroscopic element; an energy-dispersive second detector (110) that measures the intensity of the secondary X ray without splitting same; a storage device (116) that pre-stores ratios for each background intensity included in measurement results from the first and second detectors; and a calculation device (118) that waveform-separates and calculates the background intensity from the measured intensity of the specimen as measured by the second detector, performs correction by deducting a value, being the separated background intensity multiplied by the ratio, from the measured intensity for the sample as measured by the first detector, and performs quantitative analysis.
(FR) L'invention concerne un analyseur de fluorescence X permettant : une analyse de haute précision dans laquelle des composants d'arrière-plan sont éliminés ; et une mesure rapide. L'analyseur de fluorescence X comprend : une source de rayons X (100) qui irradie un rayon X primaire qui génère un rayon X secondaire, irradiant ce dernier sur une surface d'échantillon (101) à un diamètre d'irradiation d'au moins 1 mm ; un élément spectroscopique (106) qui divise le rayon X secondaire ; un premier détecteur (108) qui mesure l'intensité du rayon X secondaire divisé par l'élément spectroscopique ; un second détecteur à dispersion d'énergie (110) qui mesure l'intensité du rayon X secondaire sans la division de ce dernier ; un dispositif de mémorisation (116) qui pré-mémorise des rapports pour chaque intensité d'arrière-plan comprise dans des résultats de mesure provenant des premier et second détecteurs ; et un dispositif de calcul (118) qui sépare en formes d'onde et calcule l'intensité d'arrière-plan à partir de l'intensité mesurée de l'échantillon telle que mesurée par le second détecteur, effectue une correction par la déduction d'une valeur, l'intensité d'arrière-plan séparée étant multipliée par le rapport, à partir de l'intensité mesurée pour l'échantillon telle que mesurée par le premier détecteur, et effectue une analyse quantitative.
(JA) バックグラウンド成分を除去した高精度な分析が可能であり、かつ迅速に測定することができる蛍光X線分析装置を提供する。 蛍光X線分析装置であって、2次X線を発生させる1次X線を、試料(101)の表面に1mm以上の照射径で照射するX線源(100)と、前記2次X線を分光する分光素子(106)と、前記分光素子によって分光された前記2次X線の強度を測定する第1検出器(108)と、前記2次X線の強度を分光せずに測定するエネルギー分散型の第2検出器(110)と、前記第1及び第2検出器による測定結果に含まれる各バックグラウンド強度の比率を予め記憶する記憶装置(116)と、前記第2検出器による前記試料の測定強度から、バックグラウンド強度を波形分離して算出するとともに、前記第1検出器による前記試料の測定強度から、前記分離されたバックグラウンド強度に前記比率を乗じた値を差し引く補正をし、定量分析を行う演算装置(118)と、を有する。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)