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1. (WO2018100373) MEMS DEVICE

Pub. No.:    WO/2018/100373    International Application No.:    PCT/GB2017/053606
Publication Date: Fri Jun 08 01:59:59 CEST 2018 International Filing Date: Thu Nov 30 00:59:59 CET 2017
IPC: H04R 19/00
H04R 19/04
H04R 31/00
Applicants: CIRRUS LOGIC INTERNATIONAL SEMICONDUCTOR LIMITED
Inventors: HOEKSTRA, Tsjerk Hans
THOMSEN, Axel
JENKINS, Colin Robert
KHENKIN, Aleksey Sergeyevich
Title: MEMS DEVICE
Abstract:
A MEMS transducer comprising: a flexible membrane, the flexible membrane comprising a first membrane electrode; a back plate, the back plate comprising a first back plate electrode; wherein the back plate is supported in a spaced relation with respect to the flexible membrane. The MEMS transducer is configured to provide electrical connections to the first membrane electrode and the first back plate electrode. The flexible membrane further comprises a second membrane electrode, the second membrane electrode being electrically isolated from the first membrane electrode, wherein the first membrane electrode and the second membrane electrode are arranged to reduce variation in electrostatic forces across the flexible membrane.