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1. (WO2018100341) A CEM SWITCHING DEVICE

Pub. No.:    WO/2018/100341    International Application No.:    PCT/GB2017/053521
Publication Date: Fri Jun 08 01:59:59 CEST 2018 International Filing Date: Fri Nov 24 00:59:59 CET 2017
IPC: H01L 45/00
Applicants: ARM LTD
Inventors: ARAUJO, Carlos Alberto Paz de
CELINSKA, Jolanta Bozena
REID, Kimberly Gay
SHIFREN, Lucian
Title: A CEM SWITCHING DEVICE
Abstract:
The present techniques generally relate to an improved CEM switching device (350) and methods for its manufacture. In this device, a conductive substrate (370) and/or conductive overlay (380) each comprises a primary layer (370a, 380a) of a conductive material and a secondary layer (370b, 380b) of a conductive material. The primary layer (370a, 380a) contacting the CEM layer (360) is substantially inert to the CEM layer and/or acts an oxygen barrier for the secondary layer at temperatures used for the manufacture of the device.