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1. (WO2018099836) PLANARIZING COATING-FORMING COMPOSITION AND METHODS FOR MANUFACTURING PLANARIZING COATING AND DEVICE USING THE SAME

Pub. No.:    WO/2018/099836    International Application No.:    PCT/EP2017/080442
Publication Date: Fri Jun 08 01:59:59 CEST 2018 International Filing Date: Tue Nov 28 00:59:59 CET 2017
IPC: C07D 311/82
C07D 311/96
G03F 7/09
Applicants: AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.A.R.L.
Inventors: HAMA, Yusuke
YANAGITA, Hiroshi
ISHII, Maki
NOYA, Go
Title: PLANARIZING COATING-FORMING COMPOSITION AND METHODS FOR MANUFACTURING PLANARIZING COATING AND DEVICE USING THE SAME
Abstract:
An object is to provide a planarizing coating-forming composition having high etching resistance and good gap filling property. Another object is to provide a method for manufacturing a device using the planarizing coating-forming composition. Provided are: a planarizing coating-forming composition comprising a specific monomer (I) and a specific organic solvent (II); a method for manufacturing a planarizing coating using the planarizing coating- forming composition; and a method for manufacturing a device using the planarizing coating-forming composition.