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1. (WO2018099835) CARBON-COMPRISING UNDERLAYER-FORMING COMPOSITION AND METHODS FOR MANUFACTURING CARBON-COMPRISING UNDERLAYER AND DEVICE USING THE SAME

Pub. No.:    WO/2018/099835    International Application No.:    PCT/EP2017/080440
Publication Date: Fri Jun 08 01:59:59 CEST 2018 International Filing Date: Tue Nov 28 00:59:59 CET 2017
IPC: C07C 69/54
G03F 7/09
Applicants: AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.A.R.L.
Inventors: YANAGITA, Hiroshi
MATSUURA, Yuriko
HAMA, Yusuke
KUROSAWA, Kazunori
NAKASUGI, Shigemasa
SEKITO, Takashi
NOYA, Go
Title: CARBON-COMPRISING UNDERLAYER-FORMING COMPOSITION AND METHODS FOR MANUFACTURING CARBON-COMPRISING UNDERLAYER AND DEVICE USING THE SAME
Abstract:
An object is to provide a carbon-comprising underlayer-forming composition having goodcoating formation property and gap filling property. Another object is to provide a method for manufacturing a device using the carbon-comprising underlayer-forming composition. [Solution] Provided are: a carbon-comprising underlayer-forming composition comprising a specific acrylate derivative and a specific organic solvent; a method for manufacturing a carbon-comprising underlayer using the carbon- comprising underlayer-forming composition; and a method for manufacturing a device using the carbon-comprising underlayer-forming composition.