Search International and National Patent Collections

1. (WO2018099805) METHODS AND DEVICES FOR EXTENDING A TIME PERIOD UNTIL CHANGING A MEASURING TIP OF A SCANNING PROBE MICROSCOPE

Pub. No.:    WO/2018/099805    International Application No.:    PCT/EP2017/080257
Publication Date: Fri Jun 08 01:59:59 CEST 2018 International Filing Date: Fri Nov 24 00:59:59 CET 2017
IPC: G01Q 30/02
G01Q 70/00
H01J 37/317
Applicants: CARL ZEISS SMT GMBH
Inventors: BARALIA, Gabriel
BECKER, Rainer
KORNILOV, Kinga
BAUR, Christof
PIEPER, Hans Hermann
Title: METHODS AND DEVICES FOR EXTENDING A TIME PERIOD UNTIL CHANGING A MEASURING TIP OF A SCANNING PROBE MICROSCOPE
Abstract:
The present invention relates to methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope. In particular, the invention relates to a method for hardening a measuring tip (120, 127, 130) for a scanning probe microscope (100), comprising the step of: Processing the measuring tip (120, 127, 130) with a beam (160) of an energy beam source (152), the energy beam source (152) being part of a scanning electron microscope (100).