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1. (WO2018099742) MODEL FOR ESTIMATING STOCHASTIC VARIATION

Pub. No.:    WO/2018/099742    International Application No.:    PCT/EP2017/079683
Publication Date: Fri Jun 08 01:59:59 CEST 2018 International Filing Date: Sat Nov 18 00:59:59 CET 2017
IPC: G03F 7/20
Applicants: ASML NETHERLANDS B.V.
Inventors: HANSEN, Steven, George
Title: MODEL FOR ESTIMATING STOCHASTIC VARIATION
Abstract:
A method including: obtaining a resist process dose sensitivity value for a patterning process; applying the resist process dose sensitivity value to a stochastic model providing values of a stochastic variable as a function of resist process dose sensitivity to obtain a value of the stochastic variable; and designing or modifying a parameter of the patterning process based on the stochastic variable value.