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1. (WO2018099718) AEROSOL EVAPORATOR

Pub. No.:    WO/2018/099718    International Application No.:    PCT/EP2017/079048
Publication Date: Fri Jun 08 01:59:59 CEST 2018 International Filing Date: Tue Nov 14 00:59:59 CET 2017
IPC: C23C 14/22
B01D 1/16
C23C 16/448
Applicants: AIXTRON SE
Inventors: KRÜCKEN, Wilhelm Josef Thomas
LONG, Michael
VAN DER HEIJDEN, Rik
AL AHMAD, Nael
Title: AEROSOL EVAPORATOR
Abstract:
The invention relates to a device for providing a vapour which is transported in a carrier gas stream and is produced by evaporating liquid or solid particles, in particular of an aerosol or suspension, said device having at least one feed line (2) which opens in a housing (1) at a distance (a) in front of an end face (17') of an evaporation element (17) having heated heat exchange surfaces, to feed a stream of the aerosol or suspension in the direction of an axis (A) of the opening (5) of the feed line (2) onto the end face (17). To increase efficiency, an impact element (15) which has one or more impact surfaces (11, 12, 24) is provided between the opening (5) and the end face (17), wherein the rotationally symmetrical impact surfaces (11, 12, 24) are oriented at an angle (a, ß) greater than 10 degrees and less than 80 degrees to the axis (A).