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1. (WO2018099710) METHOD FOR OPERATING A VACUUM PUMP SYSTEM
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2018/099710 International Application No.: PCT/EP2017/078852
Publication Date: 07.06.2018 International Filing Date: 10.11.2017
IPC:
F04B 37/14 (2006.01) ,F04B 49/06 (2006.01) ,F04C 25/02 (2006.01) ,F04C 28/08 (2006.01) ,F04C 28/24 (2006.01)
F MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04
POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
B
POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
37
Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/-F04B35/187
10
for special use
14
to obtain high vacuum
F MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04
POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
B
POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
49
Control of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for in, or of interest apart from, groups F04B1/-F04B47/196
06
Control using electricity
F MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04
POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
C
ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
25
Adaptations for special use of pumps for elastic fluids
02
for producing high vacuum
F MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04
POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
C
ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
28
Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
08
characterised by varying the rotational speed
F MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04
POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
C
ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
28
Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
24
characterised by using valves regulating pressure or flow rate, e.g. discharge valves
Applicants: LEYBOLD GMBH[DE/DE]; Bonner Straße 498 50968 Köln, DE
Inventors: NAHRWOLD, Matthias; DE
PAJONK, Michael; DE
SCHILLER, Dirk; DE
SCHNEIDENBACH, Daniel; DE
WALZEL, Sebastian; DE
Agent: DOMPATENT VON KREISLER SELTING WERNER - PARTNERSCHAFT VON PATENTANWÄLTEN UND RECHTSANWÄLTEN MBB; Deichmannhaus am Dom Bahnhofsvorplatz 1 50667 Köln, DE
Priority Data:
10 2016 223 782.930.11.2016DE
Title (EN) METHOD FOR OPERATING A VACUUM PUMP SYSTEM
(FR) PROCÉDÉ PERMETTANT DE FAIRE FONCTIONNER UN SYSTÈME DE POMPAGE À VIDE
(DE) VERFAHREN ZUM BETREIBEN EINES VAKUUMPUMPENSYSTEMS
Abstract:
(EN) A processing chamber (10) is connected to a lock chamber (12). A vacuum pump system is provided for evacuating the lock chamber (12) and/or the processing chamber (10). Said system comprises a vacuum pump device (18) comprising at least one vacuum pump (20, 22). The vacuum pump system also comprises a valve device (26) for connecting to the lock chamber (12) and a control device (30). For noise reduction, a cyclically occurring operating parameter is determined by means of the control device. From this it is determined at which point the valve is to be opened such that at some point before the valve is opened, the speed of at least one of the vacuum pumps (20, 22) can be reduced. This leads to considerable noise reduction with good evacuation times.
(FR) Selon l'invention, une chambre de traitement (10) est reliée à une chambre de sas (12). Un système de pompage à vide est destiné à faire le vide dans la chambre de sas (12) et/ou la chambre de traitement (10). Ce système comprend un dispositif de pompage à vide (18) doté d'au moins une pompe à vide (20, 22). Le système de pompage à vide comprend en outre un dispositif soupape (26) destiné à être relié à la chambre de sas (12) ainsi qu'un dispositif de commande (30). Afin de réduire le bruit, un paramètre de fonctionnement se produisant cycliquement est déterminé au moyen du dispositif de commande. À partir de là, on détermine à quel instant une ouverture de la soupape a lieu, de manière à pouvoir effectuer une réduction de la vitesse de rotation d'au moins l'une des pompes à vide (20, 22) avant l'ouverture de la soupape. Ceci conduit à une réduction considérable du bruit associée à des temps de pompage en outre satisfaisants.
(DE) Eine Bearbeitungskammer (10) ist mit einer Schleusenkammer (12) verbunden. Zum Evakuieren der Schleusenkammer (12) und/oder der Bearbeitungskammer (10) ist ein Vakuumpumpensystem vorgesehen. Dieses weist eine Vakuumpumpeneinrichtung (18) mit mindestens einer Vakuumpumpe (20, 22) auf. Ferner weist das Vakuumpumpensystem eine Ventileinrichtung (26) zur Verbindung mit der Schleusenkammer (12) sowie eine Steuereinrichtung (30) auf. Zur Geräuschreduzierung wird mittels der Steuereinrichtung ein zyklisch auftretender Betriebsparameter bestimmt. Hieraus wird bestimmt zu welchem Zeitpunkt ein Öffnen des Ventils erfolgt, so dass zeitlich vor dem Öffnen des Ventils eine Reduzierung der Drehzahl zumindest einer der Vakuumpumpen (20, 22) vorgenommen werden kann. Dies führt zu einer erheblichen Geräuschreduzierung bei weiterhin guten Abpumpzeiten.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: German (DE)
Filing Language: German (DE)