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1. (WO2018099633) MEASURING SENSOR FOR SIMULTANEOUSLY MEASURING A FORCE THAT CAN BE BOTH DYNAMIC AND STATIC

Pub. No.:    WO/2018/099633    International Application No.:    PCT/EP2017/075308
Publication Date: Fri Jun 08 01:59:59 CEST 2018 International Filing Date: Fri Oct 06 01:59:59 CEST 2017
IPC: G01L 5/16
G01L 1/16
H01L 41/113
H01L 41/083
Applicants: KISTLER HOLDING AG
Inventors: CAVALLONI, Claudio
PFLUGER, Kim
Title: MEASURING SENSOR FOR SIMULTANEOUSLY MEASURING A FORCE THAT CAN BE BOTH DYNAMIC AND STATIC
Abstract:
The invention relates to a measuring sensor (1) for simultaneously measuring a force (F) that can be both dynamic and static, comprising: at least one piezoelectric sensing element (10, 10'), wherein the force (F) on element surfaces of the piezoelectric sensing element (10, 10') produces electrical polarization charges, a magnitude of the produced electrical polarization charges being proportional to a magnitude of the force (F); a resonator element (20), which can be excited at at least one resonance frequency (f); wherein the force (F) acts on the piezoelectric sensing element (10, 10') and on the resonator element (20) in a force direction; wherein the force (F) causes a transverse elongation (Q) in the resonator element (20), which transverse elongation (Q) occurs in the resonator element (20) in a transverse direction, which forms an angle different from zero with the force direction, a magnitude of the transverse elongation (Q) being proportional to the magnitude of the force (F); and wherein the transverse elongation produces a frequency change (Δf) of the resonance frequency (f), which frequency change is a function of the force (F).