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1. (WO2018099348) FOCUSING AND LEVELING DEVICE

Pub. No.:    WO/2018/099348    International Application No.:    PCT/CN2017/113118
Publication Date: Fri Jun 08 01:59:59 CEST 2018 International Filing Date: Tue Nov 28 00:59:59 CET 2017
IPC: G03F 9/00
G03F 7/20
Applicants: SHANGHAI MICRO ELECTRONICS EQUIPMENT(GROUP) CO., LTD.
上海微电子装备(集团)股份有限公司
Inventors: LAN, Ke
蓝科
WANG, Shihua
王诗华
Title: FOCUSING AND LEVELING DEVICE
Abstract:
A focusing and leveling device for calculating the defocusing amount and/or tilt amount of a substrate (60), comprising a lighting unit, a projection marking plate (10) with a projection slit marker, a projection imaging group (20), a refractive prism (30), a light splitter (40), a detection unit and a signal processing unit. A beam generated from the lighting unit forms a measurement light spot after passing through the projection marking plate (10). The projection imaging group (20) images the measurement light spot onto the surface of the substrate (60). The refractive prism (30) is used for enabling the beam, which is reflected by the surface of the substrate (60) for the first time, to be incident again onto the surface of the substrate (60) after being refracted, such that the beam which is reflected by the surface of the substrate (60) for the second time passes through the projection imaging group (20). The light splitter (40) is used for guiding the beam which is reflected by the surface of the substrate (60) for the second time to the detection unit. The signal processing unit calculates the defocusing amount and/or tilt amount of the surface of the substrate (60), according to the measurement light spot detected by the detection unit. The focusing and leveling device has a simple structure, is easy to install and regulate, and can improve the detection accuracy.