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1. (WO2018099333) ROTATING SHELF DEVICE OF NANO COATING APPARATUS

Pub. No.:    WO/2018/099333    International Application No.:    PCT/CN2017/112929
Publication Date: Fri Jun 08 01:59:59 CEST 2018 International Filing Date: Sat Nov 25 00:59:59 CET 2017
IPC: C23C 16/458
C23C 16/455
Applicants: JIANGSU FAVORED NANOTECHNOLOGY CO., LTD.
江苏菲沃泰纳米科技有限公司
Inventors: ZONG, Jian
宗坚
Title: ROTATING SHELF DEVICE OF NANO COATING APPARATUS
Abstract:
Provided is a rotating shelf device of a nano coating apparatus, the device comprising a reaction cavity (1), wherein a rotating shelf (2) is arranged in the reaction cavity (1), a central shaft of the rotating shelf (2) is a hollow pipe structure, and a through hole is arranged on the hollow pipe; a top part of the reaction cavity (1) is provided with an extraction opening, the extraction opening is on the same axis as the hollow pipe and is located above the hollow pipe; a bottom circular disc of the rotating shelf (2) is provided with an inner gear ring, a gear is mounted to a rotating electric motor shaft, and a workpiece (8) is placed on an object placement layer of the rotating shelf (2).