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1. (WO2018090048) SYSTEM FOR TRAPPING POLYMER VAPORS IN PROCESS OVEN VACUUM SYSTEMS

Pub. No.:    WO/2018/090048    International Application No.:    PCT/US2017/061631
Publication Date: Fri May 18 01:59:59 CEST 2018 International Filing Date: Wed Nov 15 00:59:59 CET 2017
IPC: B01D 5/00
B01D 47/02
C08F 22/36
C23C 16/44
F04B 37/16
H01L 21/02
Applicants: YIELD ENGINEERING SYSTEMS, INC.
Inventors: MOFFAT, William A.
McCOY, Craig, Walter
Title: SYSTEM FOR TRAPPING POLYMER VAPORS IN PROCESS OVEN VACUUM SYSTEMS
Abstract:
A trap system adapted to trap polyimide or other vapors exiting from a process chamber. The vapors are routed from the process chamber through a heated exit line at low pressure and then cooled, resulting in condensation at a selected location. The condensed vapors accumulate in a liquid trap. A method of condensing polymer vapors in vacuum exit lines of process chambers, where the flow which may have vaporized polymer vapor is cooled to enhance condensation at a chosen location. The liquid trap can be emptied and replaced, resulting in the removal of the condensed liquid. The chamber exit lines are protected from condensation build up.