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1. (WO2018089733) VERTICAL STOPPER FOR CAPPING MEMS DEVICES
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Pub. No.: WO/2018/089733 International Application No.: PCT/US2017/061001
Publication Date: 17.05.2018 International Filing Date: 10.11.2017
IPC:
B81B 7/00 (2006.01) ,B81B 3/00 (2006.01)
[IPC code unknown for B81B 7][IPC code unknown for B81B 3]
Applicants:
ANALOG DEVICES, INC. [US/US]; One Technology Way Norwood, MA 02062-9106, US
Inventors:
KUANG, Jinbo; US
VOHRA, Gaurav; US
Agent:
FRANKLIN, Thomas, A.; US
Priority Data:
15/650,82214.07.2017US
62/420,89311.11.2016US
Title (EN) VERTICAL STOPPER FOR CAPPING MEMS DEVICES
(FR) DISPOSITIF D'ARRÊT VERTICAL SERVANT À COUVRIR DES DISPOSITIFS DE MEMS
Abstract:
(EN) Capped microelectromechanical systems (MEMS) devices are described. In at least some situations, the MEMS device includes one or more masses which move. The cap may include a stopper which damps motion of the one or more movable masses. In at least some situations, the stopper damps motion of one of the masses but not another mass.
(FR) La présente invention concerne des dispositifs de systèmes micro-électromécaniques (MEMS) à capots. Dans au moins certaines situations, le dispositif de MEMS comprend une ou plusieurs masses qui se déplacent. Le capot peut comprendre un dispositif d'arrêt qui amortit le mouvement de ladite au moins une masse mobile. Dans au moins certaines situations, le dispositif d'arrêt amortit le mouvement de l'une des masses, mais pas d'une autre masse.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)