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1. (WO2018089309) REACTOR COMPONENT PLACEMENT INSIDE LINER WALL

Pub. No.:    WO/2018/089309    International Application No.:    PCT/US2017/060219
Publication Date: Fri May 18 01:59:59 CEST 2018 International Filing Date: Tue Nov 07 00:59:59 CET 2017
IPC: H01L 21/67
Applicants: REC SILICON INC
Inventors: MILLER, Matthew, J.
Title: REACTOR COMPONENT PLACEMENT INSIDE LINER WALL
Abstract:
Reaction chamber liners for use in a fluidized bed reactor for production of polysilicon-coated granulate material are disclosed. The liners include an aperture and a cavity configured to receive a reactor component, such as a probe, a sensor, a nozzle, a feed line, a sampling line, a heating/cooling component, or the like. In some embodiments, the liner is a segmented liner comprised of vertically stacked or laterally joined segments, wherein at least one segment includes an aperture and a cavity configured to receive a reactor component.