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1. (WO2018088881) HEAT CONVECTION-TYPE ACCELERATION SENSOR AND METHOD FOR MANUFACTURING SAME

Pub. No.:    WO/2018/088881    International Application No.:    PCT/KR2017/012901
Publication Date: Fri May 18 01:59:59 CEST 2018 International Filing Date: Wed Nov 15 00:59:59 CET 2017
IPC: G01P 15/08
G01P 15/18
Applicants: KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY
한국생산기술연구원
Inventors: JUNG, Dae Woong
정대웅
KIM, Jae Keon
김재건
Title: HEAT CONVECTION-TYPE ACCELERATION SENSOR AND METHOD FOR MANUFACTURING SAME
Abstract:
An embodiment of the present invention provides a heat convection-type acceleration sensor wherein the same is divided into a lower layer portion and an upper layer portion, a feature for measuring acceleration of one shaft or two shafts is formed on the lower layer portion, and a feature for measuring acceleration of three shafts is formed on the upper layer portion, thereby improving the measurement performance. A heat convection-type acceleration sensor according to an embodiment of the present invention comprises: a lower layer portion having a heater installed at the center thereof; a first temperature sensor installed on one shaft about the heater on the lower layer portion; a second temperature sensor formed on two shafts about the heater on the lower layer portion; an upper layer portion which is coupled to the upper surface of the lower layer portion, and which has an inner space formed toward the lower layer portion; and a third temperature sensor formed on the upper layer portion such that a part thereof is exposed to the inner space of the upper layer portion.