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1. (WO2018088252) PLASMA THERMAL SPRAY DEVICE AND THERMAL SPRAY CONTROL METHOD

Pub. No.:    WO/2018/088252    International Application No.:    PCT/JP2017/038958
Publication Date: Fri May 18 01:59:59 CEST 2018 International Filing Date: Sat Oct 28 01:59:59 CEST 2017
IPC: H05H 1/42
C23C 4/134
H05H 1/40
Applicants: TOKYO ELECTRON LIMITED
東京エレクトロン株式会社
Inventors: KOBAYASHI, Yoshiyuki
小林 義之
HIMORI, Shinji
檜森 慎司
FURUYA, Naokazu
古谷 直一
Title: PLASMA THERMAL SPRAY DEVICE AND THERMAL SPRAY CONTROL METHOD
Abstract:
Provided is a plasma thermal spray device comprising: a supply unit wherein a thermal spray material powder is carried by a plasma-generating gas and sprayed from an opening at a leading end portion thereof; a plasma-generating unit using the sprayed plasma-generating gas to generate plasma whereof the axis is common with that of the supply unit; a magnetic field generation unit generating a magnetic field in a generation space for the plasma; and a control unit controlling the magnetic field generation unit thereby controlling the deviation of the plasma being generated.