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1. (WO2018088079) COMPOUND, STARTING MATERIAL FOR THIN FILM FORMATION, THIN FILM PRODUCTION METHOD, AND AMIDINE COMPOUND

Pub. No.:    WO/2018/088079    International Application No.:    PCT/JP2017/036318
Publication Date: Fri May 18 01:59:59 CEST 2018 International Filing Date: Fri Oct 06 01:59:59 CEST 2017
IPC: C07F 15/06
C07C 257/14
C23C 16/18
Applicants: ADEKA CORPORATION
株式会社ADEKA
Inventors: YOSHINO, Tomoharu
吉野 智晴
SUGIURA, Nana
杉浦 奈奈
NISHIDA, Akihiro
西田 章浩
YAMASHITA, Atsushi
山下 敦史
Title: COMPOUND, STARTING MATERIAL FOR THIN FILM FORMATION, THIN FILM PRODUCTION METHOD, AND AMIDINE COMPOUND
Abstract:
Provided is a starting material for thin film formation which comprises a compound represented by general formula (1). (In the formula, R1 denotes a straight- or branched-chain alkyl group having 1-5 carbon atoms, R2 denotes a hydrogen atom or a straight- or branched-chain alkyl group having 1-5 carbon atoms, R3 and R4 each independently denote a straight- or branched-chain alkyl group having 1-5 carbon atoms, A denotes an alkane diyl group having 1-4 carbon atoms, and M denotes copper, iron, nickel, cobalt or manganese.)