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1. (WO2018087910) STATE CONTROL DEVICE, STATE CONTROL METHOD, AND MASTER CONTROLLER USED IN STATE CONTROL DEVICE

Pub. No.:    WO/2018/087910    International Application No.:    PCT/JP2016/083659
Publication Date: Fri May 18 01:59:59 CEST 2018 International Filing Date: Tue Nov 15 00:59:59 CET 2016
IPC: G05B 19/05
G05B 7/02
G05B 11/36
G05D 23/19
Applicants: RKC INSTRUMENT INC.
理化工業株式会社
Inventors: TAKAHASHI, Kouta
高橋 洸太
Title: STATE CONTROL DEVICE, STATE CONTROL METHOD, AND MASTER CONTROLLER USED IN STATE CONTROL DEVICE
Abstract:
The present invention is provided with a determination unit (15) which compares each of a plurality of difference values ΔTM, ΔTS-1, ΔTS-2 calculated by a difference value calculation unit (14), with an allowable difference value Val for measurement values with respect to a target value Ttgt that changes with the passage of time, and determines whether a difference value greater than the allowable difference value Val is present among the difference values ΔTM, ΔTS-1, ΔTS-2. A target value control unit (16) continues to change the target value Ttgt if the determination unit (15) determines that a difference value greater than the allowable difference value Val is not present, and stops changing the target value Ttgt if the determination unit (15) determines that a difference value greater than the allowable difference value Val is present.