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1. (WO2018087482) HINGED MICROELECTROMECHANICAL AND/OR NANOELECTROMECHANICAL DEVICE WITH OUT-OF-PLANE MOVEMENT

Pub. No.:    WO/2018/087482    International Application No.:    PCT/FR2017/053062
Publication Date: Fri May 18 01:59:59 CEST 2018 International Filing Date: Fri Nov 10 00:59:59 CET 2017
IPC: B81B 3/00
Applicants: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
Inventors: JOET, Loïc
BERTHELOT, Audrey
Title: HINGED MICROELECTROMECHANICAL AND/OR NANOELECTROMECHANICAL DEVICE WITH OUT-OF-PLANE MOVEMENT
Abstract:
Hinged MEMS and/or NEMS device with out-of-plane movement including: a first portion (2), and a second portion (4) that is hinged so as to be able to rotate with respect to the first portion about an axis of rotation contained in a first mean plane of the device; a hinging element (8) that connects the first portion (2) and the second portion (4) and that is stressed flexurally; a sensing element that extends between the first portion (2) and the second portion (4) and that deforms during the movement of the second portion (4); and two slats (10) that extend perpendicularly to the mean plane of the hinge device and parallel to the axis of rotation (Y), the slats (10) being placed between the hinging element (8) and the sensing element and connecting the first portion (2) and the second portion (4) and being stressed torsionally during the movement of the second portion (4).