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1. (WO2018087332) DIFFERENTIAL PRESSURE SENSOR AND FABRICATION

Pub. No.:    WO/2018/087332    International Application No.:    PCT/EP2017/078957
Publication Date: Fri May 18 01:59:59 CEST 2018 International Filing Date: Sat Nov 11 00:59:59 CET 2017
IPC: G01L 13/02
Applicants: MEASUREMENT SPECIALTIES, INC.
TYCO ELECTRONICS UK LTD
Inventors: WAGNER, David Eric
Title: DIFFERENTIAL PRESSURE SENSOR AND FABRICATION
Abstract:
A differential pressure sensor includes a first sensor housing member having a first fluid inlet port for receiving a first fluid at a first pressure and a second sensor housing member having a second fluid inlet port for receiving a second fluid at a second pressure. A pressure-sensing subassembly includes a semiconductor pressure-sensing die having a sensitive diaphragm for sensing pressure. The pressure-sensing subassembly is configured for insertion into the differential pressure sensor such that once inserted the first fluid inlet port is in fluid communication with a first surface of the sensitive diaphragm and the second fluid inlet port is in fluid communication with a second surface of the sensitive diaphragm.