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1. (WO2018086853) APPARATUS FOR COMBINED STEM AND EDS TOMOGRAPHY

Pub. No.:    WO/2018/086853    International Application No.:    PCT/EP2017/077016
Publication Date: Fri May 18 01:59:59 CEST 2018 International Filing Date: Tue Oct 24 01:59:59 CEST 2017
IPC: G01N 23/225
Applicants: IMEC VZW
Inventors: BENDER, Hugo
Title: APPARATUS FOR COMBINED STEM AND EDS TOMOGRAPHY
Abstract:
The invention is related to an apparatus for tomographic analysis of a specimen (20) based on STEM images of the specimen, as well as for tomographic analysis of the chemical composition of the specimen based on X-ray detection by EDS detectors, the apparatus comprising an elongated specimen holder (21) that is rotatable about a longitudinal axis (101) and being configured for holding a pillar-shaped specimen (20) at the end of the holder, with said longitudinal axis (101) being positioned in a sample plane (22), the sample plane being perpendicular the beam direction (100), at least two EDS detectors (16,17), each SDD having a detecting surface (16',17') oriented perpendicularly to the sample plane (22) and intersecting with said sample plane, and wherein the two EDS detectors (16,17) are positioned on opposite lateral sides of the specimen (20).