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1. (WO2018086730) METAL COMPLEXES CONTAINING CYCLOPENTADIENYL LIGANDS

Pub. No.:    WO/2018/086730    International Application No.:    PCT/EP2017/001283
Publication Date: Fri May 18 01:59:59 CEST 2018 International Filing Date: Sat Nov 04 00:59:59 CET 2017
IPC: C07F 5/00
C23C 14/12
Applicants: MERCK PATENT GMBH
Inventors: FANG, Ming
ELDO, Joby
DEZELAH, Charles
MOSER, Daniel
KANJOLIA, Ravi
Title: METAL COMPLEXES CONTAINING CYCLOPENTADIENYL LIGANDS
Abstract:
Metal complexes including cyclopentadienyl ligands and methods of using such metal complexes to prepare metal-containing films are provided.