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1. (WO2018085837) METHODS AND APPARATUS FOR DETECTION AND ANALYSIS OF NANOPARTICLES FROM SEMICONDUCTOR CHAMBER PARTS

Pub. No.:    WO/2018/085837    International Application No.:    PCT/US2017/060401
Publication Date: Sat May 12 01:59:59 CEST 2018 International Filing Date: Wed Nov 08 00:59:59 CET 2017
IPC: H01L 21/66
H01L 21/67
H01L 21/02
Applicants: APPLIED MATERIALS, INC.
Inventors: GORADIA, Prerna
BHOYAR, Sankesha
VISSER, Robert Jan
SHARMA, Vijay Bhan
SHAHANE, Renuka
Title: METHODS AND APPARATUS FOR DETECTION AND ANALYSIS OF NANOPARTICLES FROM SEMICONDUCTOR CHAMBER PARTS
Abstract:
Methods and apparatuses for the analysis and detection of nanoparticles in a liquid from a semiconductor manufacturing component are provided herein. In some embodiments, a method of determining particle count, particle size, and zeta potential of nanoparticles in a substrate processing chamber component cleaning solution, includes (a) filling a sample cell with a cleaning solution from a substrate processing chamber component cleaning tank holding a semiconductor processing chamber component; (b) directing a light from a laser to the sample cell, wherein nanoparticles within the cleaning solution scatter the light from the laser; and (c) detecting the scattered light via one or more detectors proximate the sample cell to determine the zeta potential, the particle size and particle count of nanoparticles in the cleaning solution.