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1. (WO2018085242) METHODS OF CHARACTERIZING GLASS PANELS DURING PLASMA PROCESSING
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Pub. No.: WO/2018/085242 International Application No.: PCT/US2017/059229
Publication Date: 11.05.2018 International Filing Date: 31.10.2017
IPC:
G01N 21/88 (2006.01) ,G01N 21/956 (2006.01) ,G01N 21/958 (2006.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
84
Systems specially adapted for particular applications
88
Investigating the presence of flaws, defects or contamination
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
84
Systems specially adapted for particular applications
88
Investigating the presence of flaws, defects or contamination
95
characterised by the material or shape of the object to be examined
956
Inspecting patterns on the surface of objects
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
84
Systems specially adapted for particular applications
88
Investigating the presence of flaws, defects or contamination
95
characterised by the material or shape of the object to be examined
958
Inspecting transparent materials
Applicants:
CORNING INCORPORATED [US/US]; 1 Riverfront Plaza Corning, New York 14831, US
Inventors:
MANLEY, Robert George; US
WESOLOWSKI, Piotr Janusz; US
XIE, Xi; US
Agent:
MASON, Matthew J; US
Priority Data:
62/416,83803.11.2016US
Title (EN) METHODS OF CHARACTERIZING GLASS PANELS DURING PLASMA PROCESSING
(FR) PROCÉDÉS DE CARACTÉRISATION DE PANNEAUX DE VERRE PENDANT UN TRAITEMENT AU PLASMA
Abstract:
(EN) Methods of characterizing a glass panel during a plasma-based treatment of the glass panel include capturing measurement digital images of at least a portion of the glass panel. The measurement digital images include a distorted reflection of the cathode from the glass panel surface due to a distorted surface shape of the glass panel. The distorted reflection of the cathode in the captured measurement digital images is used to estimate the surface shape of the glass panel that gives rise to the distorted reflection of the cathode. The estimated surface shape is used to identify at least one deformation of the glass panel. Moiré methods for measuring surface shape deformations of the glass panel during removal of the glass panel from the process chamber are also disclosed.
(FR) L'invention concerne des procédés de caractérisation d'un panneau de verre lors d'un traitement à base de plasma du panneau de verre qui comprennent la capture d'images numériques de mesure d'au moins une partie du panneau de verre. Les images numériques de mesure comprennent une réflexion déformée de la cathode à partir de la surface du panneau de verre en raison d'une forme de surface déformée du panneau de verre. La réflexion déformée de la cathode dans les images numériques de mesure capturées est utilisée pour estimer la forme de surface du panneau de verre qui donne lieu à la réflexion déformée de la cathode. La forme de surface estimée est utilisée pour identifier au moins une déformation du panneau de verre. L'invention concerne également des procédés de moiré pour mesurer des déformations de forme de surface du panneau de verre pendant le retrait du panneau de verre de la chambre de traitement.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)