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1. (WO2018085054) ELECTROSTATICALLY CLAMPED EDGE RING

Pub. No.:    WO/2018/085054    International Application No.:    PCT/US2017/057450
Publication Date: Sat May 12 01:59:59 CEST 2018 International Filing Date: Fri Oct 20 01:59:59 CEST 2017
IPC: H01L 21/687
H01L 21/683
H01L 21/67
H01L 21/3065
H01L 21/02
Applicants: LAM RESEARCH CORPORATION
Inventors: KIMBALL, Christopher
GAFF, Keith
WANG, Feng
Title: ELECTROSTATICALLY CLAMPED EDGE RING
Abstract:
An edge ring is provided for use with an electrostatic wafer chuck and an electrostatic ring chuck with a central aperture with a cooling groove and with ring clamping electrodes and at least one ring backside temperature channel to regulate the temperature of the edge ring. The edge ring comprises an edge ring body to be placed over the electrostatic ring chuck with ring clamping electrodes, wherein the edge ring body comprises conductive portions which are placed over the ring clamping electrodes, when the edge ring body is placed over the electrostatic ring chuck and a first elastomer ring integrated to a first surface of the edge ring body and surrounding a central aperture of the first surface, wherein when the edge ring body is placed over the electrostatic ring chuck, the first elastomer ring is used to seal the cooling groove.