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1. (WO2018084965) SUBSTRATE LOADING SYSTEM

Pub. No.:    WO/2018/084965    International Application No.:    PCT/US2017/053706
Publication Date: Sat May 12 01:59:59 CEST 2018 International Filing Date: Thu Sep 28 01:59:59 CEST 2017
IPC: H01L 21/68
B29C 43/02
B29C 59/00
B29C 59/02
G03F 7/00
H01L 21/67
Applicants: MOLECULAR IMPRINTS, INC.
Inventors: PATTERSON, Roy
AHAMED, Yaseer, A.
Title: SUBSTRATE LOADING SYSTEM
Abstract:
Methods, systems, and apparatus for a substrate transfer method, including positioning a tray handler device in a first position with i) cutouts of an aperture of the first tray in superimposition with respective pedestals of a pedestal platform and ii) a distal end of the pedestals extending away from a top surface of the first tray; increasing a distance between the top surface of the first tray and a top surface of the pedestal platform to transfer a first substrate from the pedestals to the tabs defined by the aperture of the first tray, while concurrently engaging the second tray handler with the second tray; and increasing a distance between the top surface of the second tray and the bottom surface of a chuck to transfer a second substrate from the chuck to the tabs defined by the second tray.