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1. (WO2018084376) DEFECT DETECTION DEVICE OF COMPACT CAMERA INTEGRATED MODULE
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Pub. No.: WO/2018/084376 International Application No.: PCT/KR2017/000113
Publication Date: 11.05.2018 International Filing Date: 04.01.2017
IPC:
G01N 21/88 (2006.01) ,G02B 27/28 (2006.01) ,G02B 26/10 (2006.01) ,G02B 27/30 (2006.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
84
Systems specially adapted for particular applications
88
Investigating the presence of flaws, defects or contamination
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
27
Other optical systems; Other optical apparatus
28
for polarising
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
26
Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
08
for controlling the direction of light
10
Scanning systems
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
27
Other optical systems; Other optical apparatus
30
Collimators
Applicants:
을지대학교 산학협력단 EULJI UNIVERSITY INDUSTRY ACADEMY COOPERATION FOUNDATION [KR/KR]; 경기도 성남시 수정구 산성대로 553 553, Sanseong-daero, Sujeong-gu Seongnam-si Gyeonggi-do 13135, KR
Inventors:
정현우 JEONG, Hyun Woo; KR
오요한 O, Yo Han; KR
김순배 KIM, Soon Bae; KR
이종훈 LEE, Jong Hun; KR
이승훈 LEE, Seung Hoon; KR
Agent:
한윤호 HAN, Yun Ho; KR
Priority Data:
10-2016-014734207.11.2016KR
Title (EN) DEFECT DETECTION DEVICE OF COMPACT CAMERA INTEGRATED MODULE
(FR) DISPOSITIF DE DÉTECTION DE DÉFAUT DE MODULE INTÉGRÉ DE CAMÉRA COMPACTE
(KO) 소형카메라 통합모듈의 불량 검출 장치
Abstract:
(EN) Provided is a defect detection device of a compact camera integrated module that detects a defect of a compact camera integration module by distributing a low-coherence beam or a high-speed wavelength variable beam to a sample stage for scanning the compact camera integrated module sample and a reference stage for acquiring image information of the sample, respectively, generating an interference signal using a sample signal and a reference signal that are respectively obtained from the sample stage and the reference stage, and converting the interference signal into an image and evaluating the image. As such, it is possible to quickly and efficiently detect whether or not a compact camera integrated module is defective.
(FR) L’invention concerne un dispositif de détection de défaut d’un module intégré de caméra compacte qui détecte un défaut d’un module d’intégration de caméra compacte en distribuant un faisceau à faible cohérence ou un faisceau à longueur d’onde variable à grande vitesse à un étage d’échantillon pour l’analyse de l’échantillon de module intégré de caméra compacte et à un étage de référence pour l’acquisition d’informations d’images de l’échantillon, respectivement, en générant un signal d’interférence au moyen d’un signal d’échantillon et d’un signal de référence qui sont obtenus respectivement de l’étage d’échantillon et de l’étage de référence, et en convertissant le signal d’interférence en une image et en évaluant l’image. Par conséquent, il est possible de détecter rapidement et efficacement si un module intégré de caméra compacte est défectueux ou non.
(KO) 저 결맞음 광선 또는 고속파장가변광선으로 소형카메라 통합모듈 샘플을 스캐닝하는 샘플단 및 샘플의 영상정보를 얻기 위한 기준단으로 각각 분배하여, 상기 샘플단 및 기준단으로부터 각각 수득된 샘플신호 및 기준신호를 이용하여 간섭신호를 생성하고, 상기 간섭신호를 영상으로 변환하여 평가함으로써 소형카메라 통합모듈의 불량을 검출하는 소형카메라 통합모듈의 불량 검출 장치를 제공한다. 따라서, 소형카메라 통합모듈의 불량 여부를 신속하고 효율적으로 검출할 수 있도록 한다.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Korean (KO)
Filing Language: Korean (KO)