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1. (WO2018084214) VACUUM PROCESSING DEVICE

Pub. No.:    WO/2018/084214    International Application No.:    PCT/JP2017/039629
Publication Date: Sat May 12 01:59:59 CEST 2018 International Filing Date: Thu Nov 02 00:59:59 CET 2017
IPC: C23C 14/56
C23C 14/34
C23C 14/50
H01L 21/677
Applicants: ULVAC, INC.
株式会社アルバック
Inventors: MINAMI Hirofumi
南 展史
SUZUKI Takayuki
鈴木 傑之
MUSHA Kazuhiro
武者 和博
NAKAO Hirotoshi
中尾 裕利
SATOU Seiichi
佐藤 誠一
Title: VACUUM PROCESSING DEVICE
Abstract:
Provided is a vacuum processing device that requires a small area for installation. In this vacuum processing device, a lifting/lowering plate 15 is disposed within a vacuum tank 12, and a substrate holding device 27 is disposed on the lifting/lowering plate 15 to be able to move vertically. An upper side processing device 40 and a lower side processing device 50 are provided in a processing region 12a located on the side of a lifting/lowering region 12b in which the lifting/lowering plate 15 vertically moves. An upper side moving device 35 and a lower side moving device 36 allow the substrate holding device 27 to pass through the processing region 12a, and a transfer device 37 allows the substrate holding device 27 to be passed between the upper side moving device 35 or the lower side moving device 36 and the lifting/lowering plate 15. Since vacuum processing can be performed on the upper side and the lower side, the vacuum processing device 10 requires a small area for installation.