Search International and National Patent Collections
|1. (WO2018084214) VACUUM PROCESSING DEVICE|
|Title:||VACUUM PROCESSING DEVICE|
Provided is a vacuum processing device that requires a small area for installation. In this vacuum processing device, a lifting/lowering plate 15 is disposed within a vacuum tank 12, and a substrate holding device 27 is disposed on the lifting/lowering plate 15 to be able to move vertically. An upper side processing device 40 and a lower side processing device 50 are provided in a processing region 12a located on the side of a lifting/lowering region 12b in which the lifting/lowering plate 15 vertically moves. An upper side moving device 35 and a lower side moving device 36 allow the substrate holding device 27 to pass through the processing region 12a, and a transfer device 37 allows the substrate holding device 27 to be passed between the upper side moving device 35 or the lower side moving device 36 and the lifting/lowering plate 15. Since vacuum processing can be performed on the upper side and the lower side, the vacuum processing device 10 requires a small area for installation.