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1. (WO2018084133) ULTRAVIOLET TREATMENT DEVICE

Pub. No.:    WO/2018/084133    International Application No.:    PCT/JP2017/039275
Publication Date: Sat May 12 01:59:59 CEST 2018 International Filing Date: Wed Nov 01 00:59:59 CET 2017
IPC: B08B 7/00
G03F 1/82
Applicants: USHIO DENKI KABUSHIKI KAISHA
ウシオ電機株式会社
Inventors: YOSHIHARA, Keita
吉原 啓太
YAMAMORI, Kenji
山森 賢治
Title: ULTRAVIOLET TREATMENT DEVICE
Abstract:
The purpose of the present invention is to provide an ultraviolet treatment device capable of treating, with high reliability, portions of a surface to be treated of an object to be treated. An ultraviolet treatment device comprising an ultraviolet radiation lamp that emits ultraviolet radiation and an ultraviolet radiation-transmissive window member, said ultraviolet treatment device irradiating, with ultraviolet radiation from the ultraviolet radiation lamp, a region to be treated of an object to be treated that is opposedly set apart from the ultraviolet radiation-transmissive window member, wherein said ultraviolet treatment device is characterized in that: a light-blocking member that blocks light from the ultraviolet radiation lamp and is shaped correspondingly with respect to the shape of a region not to be treated of the object to be treated that is exclusive of the region to be treated is provided so as to face the region not to be treated and be set apart from the object to be treated; and a purge gas supply port is provided to the light-blocking member, said purge gas supply port supplying a purge gas into the gap between the light-blocking member and the object to be treated.