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1. (WO2018084021) DICING SHEET

Pub. No.:    WO/2018/084021    International Application No.:    PCT/JP2017/038302
Publication Date: Sat May 12 01:59:59 CEST 2018 International Filing Date: Wed Oct 25 01:59:59 CEST 2017
IPC: H01L 21/301
C09J 7/02
C09J 201/00
Applicants: LINTEC CORPORATION
リンテック株式会社
Inventors: YAMASHITA Shigeyuki
山下 茂之
Title: DICING SHEET
Abstract:
A dicing sheet 1 comprising at least a base material 2 and an adhesive layer 3 laminated on a first surface side of the base material 2. The arithmetic mean roughness (Ra) of a second surface of the base material 2 is 0.01–0.5 µm. The maximum height roughness (Rz) of the second surface of the base material 2 is no more than 3 µm. Said dicing sheet 1 has light transmittance properties suitable for high magnification imaging of a workpiece.