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1. (WO2018083990) IMAGING ELEMENT, IMAGING DEVICE AND ELECTRONIC DEVICE

Pub. No.:    WO/2018/083990    International Application No.:    PCT/JP2017/037791
Publication Date: Sat May 12 01:59:59 CEST 2018 International Filing Date: Fri Oct 20 01:59:59 CEST 2017
IPC: H01L 27/146
H01L 21/302
H04N 5/369
Applicants: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
ソニーセミコンダクタソリューションズ株式会社
Inventors: NEYA Koji
閨 宏司
Title: IMAGING ELEMENT, IMAGING DEVICE AND ELECTRONIC DEVICE
Abstract:
The present disclosure relates to: an imaging element which is capable of blocking light to a charge storage part at low cost, while retaining a charge transfer path from a photodiode to the charge storage part; an imaging device; and an electronic device. According to the present invention, the depth and the number of intersections of a groove, in which a reactive gas flows, in a portion of a photomask pattern, where a groove in which a groove-buried film having light blocking properties for preventing color mixing of photodiodes is to be formed, are adjusted, so that the depth of the groove is adjusted in accordance with the amount of contact with the reactive gas. Consequently, groove-buried films having a plurality of depths are able to be formed by a single dry etching with use of a single mask pattern, so that the production cost is able to be reduced. The present invention is applicable to an imaging element.