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1. (WO2018083986) ADHESIVE SHEET FOR STEALTH DICING

Pub. No.:    WO/2018/083986    International Application No.:    PCT/JP2017/037739
Publication Date: Sat May 12 01:59:59 CEST 2018 International Filing Date: Thu Oct 19 01:59:59 CEST 2017
IPC: H01L 21/301
B32B 27/00
C09J 7/02
C09J 201/00
Applicants: LINTEC CORPORATION
リンテック株式会社
Inventors: YAMASHITA Shigeyuki
山下 茂之
Title: ADHESIVE SHEET FOR STEALTH DICING
Abstract:
An adhesive sheet for stealth dicing, comprising a base material and an adhesive layer laminated on to one surface side of the base material. The adhesive sheet for stealth dicing fulfills the relationship indicated by formula (1) (∆L90°C–∆L60°C<0 µm … (1)) when the base material is heated using a thermomechanical analysis device from 25°C to 120°C at a temperature-increasing speed of 20°C/min and the base material is pulled under a load of 0.2 g, ∆L60°C being the amount of change in length of the base material obtained when the initial length of the base material is deducted from the length of the base material at 60°C, and ∆L90°C being the amount of change in the length of the base material obtained when the initial length of the base material is deducted from the length of the base material at 90°C. Said adhesive sheet for stealth dicing has excellent heat shrinking properties.