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1. (WO2018083914) PLATING TREATMENT TOOL AND PLATING TREATMENT DEVICE

Pub. No.:    WO/2018/083914    International Application No.:    PCT/JP2017/034832
Publication Date: Sat May 12 01:59:59 CEST 2018 International Filing Date: Thu Sep 28 01:59:59 CEST 2017
IPC: C23C 18/31
G11B 5/84
Applicants: KOHAN KOGYO CO., LTD.
鋼鈑工業株式会社
Inventors: FUJII Toru
藤井 透
SAMURA Maki
佐村 真樹
NISHIZAKI Tsutomu
西崎 努
SIIGI Masahiro
椎木 祐浩
YAMAMOTO Yasuo
山本 靖雄
Title: PLATING TREATMENT TOOL AND PLATING TREATMENT DEVICE
Abstract:
[Problem] to provide a plating treatment tool and a plating treatment device in which it is possible to suppress the occurrence of nodules even when the plating treatment tool rotates in a plating bath. [Solution] This plating treatment tool is used for immersing a disk-shaped substrate having a central hole in a plating liquid within a plating bath, wherein the plating treatment tool is characterized by including a support rod inserted through the central hole in the substrate, a restricting member provided with a rotation-suppressing mechanism that supports the support rod and suppresses rotation of the supported support rod, and a carousel to which the support rod is attached with the restricting member interposed therebetween.