Search International and National Patent Collections

1. (WO2018083582) HEATING METHOD FOR A REACTOR FOR EPITAXIAL DEPOSITION AND REACTOR FOR EPITAXIAL DEPOSITION

Pub. No.:    WO/2018/083582    International Application No.:    PCT/IB2017/056720
Publication Date: Sat May 12 01:59:59 CEST 2018 International Filing Date: Tue Oct 31 00:59:59 CET 2017
IPC: C30B 25/10
C23C 16/46
Applicants: LPE S.P.A.
Inventors: OGLIARI, Vincenzo
PRETI, Silvio
PRETI, Franco
Title: HEATING METHOD FOR A REACTOR FOR EPITAXIAL DEPOSITION AND REACTOR FOR EPITAXIAL DEPOSITION
Abstract:
The present invention relates to a heating method for a reactor (1) for epitaxial deposition; the reactor (1) comprises a susceptor (2) and an inductor (4); the inductor (4) is adapted to heat the susceptor (2) by electromagnetic induction when it is electrically powered; the inductor (4) comprises a plurality of turns (41-47); during heating of the susceptor (2) from a first temperature to a second temperature, the position of one or more turns (43) of the inductor (4) with respect to the susceptor (2) and to the other turns of the inductor (4) is changed. The turns (43) are actuated by means of an appropriate actuation system (61, 62, 63).