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1. (WO2018083174) YTTRIUM ALUMINUM SILICATE GLASS CERAMIC COATING FOR SEMICONDUCTOR CHAMBER APPARATUS

Pub. No.:    WO/2018/083174    International Application No.:    PCT/EP2017/078048
Publication Date: Sat May 12 01:59:59 CEST 2018 International Filing Date: Fri Nov 03 00:59:59 CET 2017
IPC: C04B 41/86
H01L 21/687
C03C 3/11
Applicants: MORGAN ADVANCED CERAMICS, INC
MORGAN ADVANCED MATERIALS PLC.
Inventors: LEE, Chengtsin
Title: YTTRIUM ALUMINUM SILICATE GLASS CERAMIC COATING FOR SEMICONDUCTOR CHAMBER APPARATUS
Abstract:
Articles may be protected against halide plasma, by applying a rare earth-containing glaze to the surface of the article. The glaze may be a coating comprising; 20 to 90 mol% SiO2, 0 to 60 mol% Al2O3, 10 to 80 mol% rare earth oxides and/or rare earth fluorides (REX), wherein SiO2+ Al2O3+REX ≥60 mol%.